Publication
Title
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
Author
Abstract
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 2014
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
115:23(2014), 9 p.
Article Reference
233303
ISI
000338106000008
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 23.06.2014
Last edited 19.08.2018
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