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Title
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Investigation of 50 Hz pulsed DC nitrogen plasma with active screen cage by trace rare gas optical emission spectroscopy
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Author
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Abstract
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| Optical emission spectroscopy is used to investigate the nitrogen-hydrogen with trace rare gas (4% Ar) plasma generated by 50 Hz pulsed DC discharges. The filling pressure varies from 1 mbar to 5 mbar and the current density ranges from 1 mA.cm(-2) to 4 mA.cm(-2). The hydrogen concentration in the mixture plasma varies from 0% to 80%, with the objective of identifying the optimum pressure, current density and hydrogen concentration for active species ([N] and [N-2]) generation. It is observed that in an N-2-H-2 gas mixture, the concentration of N atom density decreases with filling pressure and increases with current density, with other parameters of the discharge kept unchanged. The maximum concentrations of active species were found for 40% H-2 in the mixture at 3 mbar pressure and current density of 4 mA.cm(-2). |
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Language
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English
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Source (journal)
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Plasma science & technology. - Beijing, 1999, currens
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Publication
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Beijing
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Institute of Plasma Physics, the Chinese Academy of Sciences
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2014
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ISSN
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1009-0630
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DOI
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10.1088/1009-0630/16/4/05
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Volume/pages
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16
:4
(2014)
, p. 324-328
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ISI
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000335909600005
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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