Title
Investigation of 50 Hz pulsed DC nitrogen plasma with active screen cage by trace rare gas optical emission spectroscopy
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Beijing :Institute of Plasma Physics, the Chinese Academy of Sciences ,
Subject
Physics
Source (journal)
Plasma science & technology. - Beijing, 1999, currens
Volume/pages
16(2014) :4 , p. 324-328
ISSN
1009-0630
ISI
000335909600005
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
Optical emission spectroscopy is used to investigate the nitrogen-hydrogen with trace rare gas (4% Ar) plasma generated by 50 Hz pulsed DC discharges. The filling pressure varies from 1 mbar to 5 mbar and the current density ranges from 1 mA.cm(-2) to 4 mA.cm(-2). The hydrogen concentration in the mixture plasma varies from 0% to 80%, with the objective of identifying the optimum pressure, current density and hydrogen concentration for active species ([N] and [N-2]) generation. It is observed that in an N-2-H-2 gas mixture, the concentration of N atom density decreases with filling pressure and increases with current density, with other parameters of the discharge kept unchanged. The maximum concentrations of active species were found for 40% H-2 in the mixture at 3 mbar pressure and current density of 4 mA.cm(-2).
E-info
https://repository.uantwerpen.be/docman/iruaauth/596056/d4a7709.pdf
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