Publication
Title
Modeling and experimental investigation of the plasma uniformity in capacitively coupled plasmas, operating in single frequency and dual frequency regime
Author
Abstract
Language
English
Source (journal)
Journal of vacuum science and technology: A: vacuum surfaces and films. - New York, N.Y., 1983, currens
Publication
New York, N.Y. : 2015
ISSN
0734-2101
Volume/pages
33:2(2015), 15 p.
Article Reference
021310
ISI
000355739500026
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.02.2015
Last edited 11.05.2018
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