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Title
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Description of the thermalization process of the sputtered atoms in a glow discharge using a 3-dimensional Monte Carlo method
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Author
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Language
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English
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Source (journal)
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Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
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Publication
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New York, N.Y.
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American Institute of Physics
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1995
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ISSN
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0021-8979
[print]
1089-7550
[online]
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DOI
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10.1063/1.358887
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Volume/pages
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77
(1995)
, p. 1868-1874
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ISI
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A1995RC30300006
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Full text (Publisher's DOI)
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