Publication
Title
Description of the thermalization process of the sputtered atoms in a glow discharge using a 3-dimensional Monte Carlo method
Author
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 1995
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
77(1995), p. 1868-1874
ISI
A1995RC30300006
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 22.09.2017
To cite this reference