Publication
Title
Fluorinesilicon surface reactions during cryogenic and near room temperature etching
Author
Abstract
Language
English
Source (journal)
The journal of physical chemistry : C : nanomaterials and interfaces. - Washington, D.C., 2007, currens
Publication
Washington, D.C. : 2014
ISSN
1932-7447 [print]
1932-7455 [online]
Volume/pages
118:51(2014), p. 30315-30324
ISI
000347360200101
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 10.02.2015
Last edited 19.05.2018
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