Publication
Title
Electromagnetic effects in high-frequency large-area capacitive discharges : a review
Author
Abstract
Language
English
Source (journal)
Journal of vacuum science and technology: A: vacuum surfaces and films. - New York, N.Y., 1983, currens
Publication
Melville : A v s amer inst physics, 2015
ISSN
0734-2101
Volume/pages
33:2(2015), 15 p.
Article Reference
020801
ISI
000355739500007
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 04.03.2015
Last edited 02.12.2018
To cite this reference