Title
Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arcThermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc
Author
Faculty/Department
Faculty of Sciences. Chemistry
Faculty of Sciences. Physics
Research group
Electron microscopy for materials research (EMAT)
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
article
Publication
Lausanne,
Subject
Physics
Source (journal)
Thin solid films: an international journal on the science and technology of thin and thick films. - Lausanne
Volume/pages
578(2015), p. 133-138
ISSN
0040-6090
ISI
000351686500019
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A series of [TiN/TiAlN](n) multilayer coatings with different bilayer numbers n=5, 10, 25, 50, and 100 were deposited on stainless steel substrate AISI 304 by a lateral rotating cathode arc technique in a flowing nitrogen atmosphere. The composition and microstructure of the coatings have been analyzed by using energy dispersive X-ray spectroscopy, X-ray diffraction (XRD), and conventional and high-resolution transmission electron microscopy (HRTEM). XRD analysis shows that the preferential orientation growth along the (111) direction is reduced in the multilayer coatings. TEM analysis reveals that the grain size of the coatings decreases with increasing bilayer number. HRTEM imaging of the multilayer coatings shows a high density misfit dislocation between the TiN and TiAlN layers. The cross-plane thermal conductivity of the coatings was measured by a pulsed photothermal reflectance technique. With increasing bilayer number, the multilayer coatings' thermal conductivity decreases gradually. This reduction of thermal conductivity can be ascribed to increased phonon scattering due to the disruption of columnar structure, reduced preferential orientation, decreased grain size of the coatings and present misfit dislocations at the interfaces. (C) 2015 Elsevier B.V. All rights reserved.
E-info
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