Publication
Title
Alternative metals for advanced interconnects
Author
Abstract
We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.
Language
English
Source (journal)
2014 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC)
Source (book)
IEEE International Interconnect Technology Conference / Advanced, Metallization Conference (IITC/AMC), MAY 20-23, 2014, San Jose, CA
Publication
New york : Ieee, 2014
ISBN
978-1-4799-5018-8
Volume/pages
(2014), p. 173-175
ISI
000356605200022
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.09.2015
Last edited 30.10.2017
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