Title
Alternative metals for advanced interconnects Alternative metals for advanced interconnects
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
conferenceObject
Publication
New york :Ieee ,
Subject
Physics
Engineering sciences. Technology
Source (journal)
2014 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC)
Source (book)
IEEE International Interconnect Technology Conference / Advanced, Metallization Conference (IITC/AMC), MAY 20-23, 2014, San Jose, CA
Volume/pages
(2014) , p. 173-175
ISBN
978-1-4799-5018-8
ISI
000356605200022
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Abstract
We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.
E-info
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https://repository.uantwerpen.be/docman/iruaauth/f279fe/127033.pdf
Handle