Title
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Plasma-enhanced chemical vapour deposition of amorphous Se films
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Author
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Language
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English
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Source (journal)
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Journal de physique. - Paris, 1963 - 1990
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Publication
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Paris
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1995
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ISSN
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0302-0738
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DOI
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10.1051/JPHYSCOL:19955131
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Volume/pages
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C5
(1995)
, p. 1109-1115
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ISI
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A1995RQ51000064
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Full text (Publisher's DOI)
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