Publication
Title
Depth strain profile with sub-nm resolution in a thin silicon film using medium energy ion scattering
Author
Abstract
Language
English
Source (journal)
Physica Status Solidi. A, Applications and Materials Science. - [S.l.], 2001, currens
Publication
[S.l.] : Wiley-VCH, 2012
ISSN
1862-6319
Volume/pages
209:2(2012), p. 265-267
ISI
000303382700005
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
External links
Web of Science
Record
Identification
Creation 07.11.2016
Last edited 23.09.2018