Title
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Improved strain precision with high spatial resolution using nanobeam precession electron diffraction
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Author
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Abstract
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NanoBeam Electron Diffraction is a simple and efficient technique to measure strain in nanostructures. Here, we show that improved results can be obtained by precessing the electron beam while maintaining a few nanometer probe size, i.e., by doing Nanobeam Precession Electron Diffraction (N-PED). The precession of the beam makes the diffraction spots more uniform and numerous, making N-PED more robust and precise. In N-PED, smaller probe size and better precision are achieved by having diffraction disks instead of diffraction dots. Precision in the strain measurement better than 2 × 10−4 is obtained with a probe size approaching 1 nm in diameter. |
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Language
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English
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Source (journal)
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Applied physics letters / American Institute of Physics. - New York, N.Y., 1962, currens
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Publication
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New York, N.Y.
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American Institute of Physics
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2013
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ISSN
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0003-6951
[print]
1077-3118
[online]
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DOI
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10.1063/1.4829154
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Volume/pages
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103
(2013)
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Article Reference
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241913
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ISI
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000328706500031
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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