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Title
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Properties of ALD aluminum-doped ZnO as transparent conductive oxide
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Author
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Abstract
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| Thin films of aluminum-doped ZnO are prepared by Atomic Layer Deposition (ALD). The properties of these films toward application as transparent conductive oxides are studied. It is obtained that doped films possess high optical transmittance (>85%) in the visible and near-infrared spectral ranges. A resistivity as low as 3x10(-3) Omega.cm depending of the Al content in the doped film is measured. The observed high conductivity and high transparency fulfil the requirements for transparent conductors. |
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Language
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English
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Source (journal)
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Izvestija po himija. - Sofija
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Source (book)
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Scientific Session on Advanced Materials and Technologies, OCT 10-11, 2016, Sofia, BULGARIA
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Publication
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Sofia
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Bulgarian acad science
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2016
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ISSN
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0324-1130
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Volume/pages
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48
(2016)
, p. 193-197
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ISI
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000392372400041
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Full text (publisher's version - intranet only)
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