Publication
Title
Progress and prospects in nanoscale dry processes : how can we control atomic layer reactions?
Author
Abstract
Language
English
Source (journal)
Japanese journal of applied physics / Japan Society of Applied Physics. - Kyoto, 1962, currens
Publication
Bristol : Iop publishing ltd, 2017
ISSN
0021-4922
1347-4065 [e-ISSN]
Volume/pages
56:6(2017), 13 p.
Article Reference
06HA02
ISI
000425887900001
Full text (Publisher's DOI)
Full text (open access)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 19.06.2017
Last edited 02.10.2018
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