Publication
Title
Ion energy and angular distribution in biased inductively coupled Ar/ discharges by using a hybrid model
Author
Abstract
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2017
ISSN
1612-8850
Volume/pages
14:4-5(2017), 9 p.
Article Reference
1600100
ISI
000403074000002
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 13.07.2017
Last edited 11.08.2018
To cite this reference