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Title
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Imaging theory for the ISTEM imaging mode
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Author
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Abstract
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| A relatively simple yet accurate analytical model for the image formation in the imaging scanning TEM (ISTEM) imaging mode, which implements partial spatial incoherence using a combination of scanning illumination and conventional imaging, is presented. Based on an object function approximation the ISTEM intensity can be divided into a constant, a linear and a nonlinear term. Under certain conditions, which are discussed, the formation of both linear and nonlinear terms can be expressed by convolutions with point spread functions. A closer inspection of these allows an insight into the advantages of ISTEM compared to conventional TEM (CTEM). The findings of the proposed model are confirmed by comparison to multislice simulations. A close investigation of the linear coherent contrast transfer function allows the derivation of optimal imaging conditions to reach a maximum resolution for a given signal-to-noise ratio. The robustness of ISTEM towards temporal incoherence is finally demonstrated and discussed within the model. (C) 2017 Elsevier B.V. All rights reserved. |
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Language
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English
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Source (journal)
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Ultramicroscopy. - Amsterdam
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Publication
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Amsterdam
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2017
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ISSN
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0304-3991
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DOI
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10.1016/J.ULTRAMIC.2017.04.010
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Volume/pages
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181
(2017)
, p. 107-116
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ISI
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000411170800013
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Pubmed ID
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28527980
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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