Publication
Title
Plasma-enhanced atomic layer deposition of silver using Ag(fod)() and -plasma
Author
Abstract
Language
English
Source (journal)
Chemistry of materials. - Washington, D.C, 1989, currens
Publication
Washington, D.C : American Chemical Society, 2017
ISSN
0897-4756
Volume/pages
29:17(2017), p. 7114-7121
ISI
000410868600012
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 07.11.2017
Last edited 09.12.2018
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