Publication
Title
Epitaxial CVD Growth of Ultra-Thin Si Passivation Layers on Strained Ge Fin Structures
Author
Abstract
Language
English
Source (journal)
ECS journal of solid state science and technology / Electrochemical Society. - Pennington (N.J.), s.a.
Publication
Pennington (N.J.) : Electrochemical society, 2018
ISSN
2162-8769
2162-8777
Volume/pages
7:2(2018), p. P66-P72
ISI
000425215200010
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 06.03.2018
Last edited 10.12.2018
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