Title
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Thickness dependence of scattering cross-sections in quantitative scanning transmission electron microscopy
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Author
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Abstract
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In quantitative scanning transmission electron microscopy (STEM), scattering cross-sections have been shown to be very sensitive to the number of atoms in a column and its composition. They correspond to the integrated intensity over the atomic column and they outperform other measures. As compared to atomic column peak intensities, which saturate at a given thickness, scattering cross-sections increase monotonically. A study of the electron wave propagation is presented to explain the sensitivity of the scattering cross-sections. Based on the multislice algorithm, we analyse the wave propagation inside the crystal and its link to the scattered signal for the different probe positions contained in the scattering cross-section for detector collection in the low-, middle- and high-angle regimes. The influence to the signal from scattering of neighbouring columns is also discussed. |
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Language
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English
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Source (journal)
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Ultramicroscopy. - Amsterdam
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Publication
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Amsterdam
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2018
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ISSN
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0304-3991
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DOI
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10.1016/J.ULTRAMIC.2018.01.005
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Volume/pages
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187
(2018)
, p. 84-92
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ISI
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000428131200011
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Pubmed ID
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29413416
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Full text (Publisher's DOI)
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Full text (open access)
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Full text (publisher's version - intranet only)
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