Publication
Title
Thickness dependence of scattering cross-sections in quantitative scanning transmission electron microscopy
Author
Abstract
In quantitative scanning transmission electron microscopy (STEM), scattering cross-sections have been shown to be very sensitive to the number of atoms in a column and its composition. They correspond to the integrated intensity over the atomic column and they outperform other measures. As compared to atomic column peak intensities, which saturate at a given thickness, scattering cross-sections increase monotonically. A study of the electron wave propagation is presented to explain the sensitivity of the scattering cross-sections. Based on the multislice algorithm, we analyse the wave propagation inside the crystal and its link to the scattered signal for the different probe positions contained in the scattering cross-section for detector collection in the low-, middle- and high-angle regimes. The influence to the signal from scattering of neighbouring columns is also discussed.
Language
English
Source (journal)
Ultramicroscopy. - Amsterdam
Publication
Amsterdam : 2018
ISSN
0304-3991
DOI
10.1016/J.ULTRAMIC.2018.01.005
Volume/pages
187 (2018) , p. 84-92
ISI
000428131200011
Pubmed ID
29413416
Full text (Publisher's DOI)
Full text (open access)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Complex hetero-nanosystems: three-dimensional characterisation down to the atomic scale.
Bringing light atoms to light: precise characterization of light-atom nanostructures using transmission electron microscopy.
ESTEEM 2 - Enabling science and technology through European electron microscopy.
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identifier
Creation 06.03.2018
Last edited 09.10.2023
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