Publication
Title
On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
Author
Abstract
Language
English
Source (journal)
ECS journal of solid state science and technology / Electrochemical Society. - Pennington (N.J.), s.a.
Publication
Pennington (N.J.) : Electrochemical society, 2018
ISSN
2162-8769
2162-8777
Volume/pages
7:5(2018), p. P228-P237
ISI
000440834200010
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 07.09.2018
Last edited 03.10.2018
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