| Title |
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Inclusions in magnetron sputtered thin films: a study by means of electron microscopy
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| Author |
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| Language |
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English
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| Source (journal) |
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Microscopy, microanalysis, microstructures. - Ivry, 1980 - 1998 | |
| Publication |
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Ivry : 1996
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| ISSN |
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1154-2799
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| Volume/pages |
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7(1996), p. 17-25
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| ISI |
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A1996UD94200002
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| Full text (Publisher's DOI) |
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