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Title
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Inclusions in magnetron sputtered thin films: a study by means of electron microscopy
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Author
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Language
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English
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Source (journal)
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Microscopy, microanalysis, microstructures. - Ivry, 1980 - 1998
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Publication
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Ivry
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1996
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ISSN
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1154-2799
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DOI
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10.1051/MMM:1996104
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Volume/pages
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7
(1996)
, p. 17-25
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ISI
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A1996UD94200002
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Full text (Publisher's DOI)
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