Publication
Title
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma
Author
Abstract
Language
English
Source (journal)
Journal of physics: D: applied physics. - London
Publication
London : 2019
ISSN
0022-3727
Volume/pages
52:1(2019), 16 p.
Article Reference
015206
ISI
000448423800002
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (open access)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Computer modelling and experimental validation of plasmas and plasma- surface interactions, for a deep insight in cryogenic etching (Cryoetch).
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 10.12.2018
Last edited 01.12.2019
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