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Title
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Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping
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Author
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Abstract
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| Strain has a strong effect on the properties of materials and the performance of electronic devices. Their ever shrinking size translates into a constant demand for accurate and precise measurement methods with a very high spatial resolution. In this regard, transmission electron microscopes are key instruments thanks to their ability to map strain with a subnanometer resolution. Here, we present a method to measure strain at the nanometer scale based on the diffraction of electron Bessel beams. We demonstrate that our method offers a strain sensitivity better than 2.5 × 10−4 and an accuracy of 1.5 × 10−3, competing with, or outperforming, the best existing methods with a simple and easy to use experimental setup. |
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Language
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English
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Source (journal)
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Applied physics letters / American Institute of Physics. - New York, N.Y., 1962, currens
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Related dataset(s)
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Publication
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New York, N.Y.
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American Institute of Physics
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2019
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ISSN
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0003-6951
[print]
1077-3118
[online]
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DOI
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10.1063/1.5096245
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Volume/pages
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114
:24
(2019)
, 5 p.
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Article Reference
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243501
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ISI
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000472599100019
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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Full text (open access)
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