Publication
Title
Role of sputtered Cu atoms and ions in a direct current glow discharge: combined fluid and Monte Carlo model
Author
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 1996
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
79:3(1996), p. 1279-1286
ISI
A1996TT92200011
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 14.06.2017
To cite this reference