Title
The creation of silicon nitride coatings by successive gas-phase reactions with trichlorosilane and ammonia: chemical surface coating: a new route towards thin ceramic layers on silica The creation of silicon nitride coatings by successive gas-phase reactions with trichlorosilane and ammonia: chemical surface coating: a new route towards thin ceramic layers on silica
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Warszawa ,
Source (journal)
Polish journal of chemistry. - Warszawa
Volume/pages
70(1996) , p. 838-849
ISSN
0035-7677
ISI
A1996UV76800002
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle