Publication
Title
The creation of silicon nitride coatings by successive gas-phase reactions with trichlorosilane and ammonia: chemical surface coating: a new route towards thin ceramic layers on silica
Author
Language
English
Source (journal)
Polish journal of chemistry. - Warszawa
Publication
Warszawa : 1996
ISSN
0035-7677
Volume/pages
70(1996), p. 838-849
ISI
A1996UV76800002
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 12.08.2017
To cite this reference