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Title
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The creation of silicon nitride coatings by successive gas-phase reactions with trichlorosilane and ammonia: chemical surface coating: a new route towards thin ceramic layers on silica
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Author
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Language
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English
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Source (journal)
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Polish journal of chemistry. - Warszawa
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Publication
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Warszawa
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1996
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ISSN
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0035-7677
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Volume/pages
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70
(1996)
, p. 838-849
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ISI
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A1996UV76800002
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