Title
Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Oxford ,
Source (journal)
Spectrochimica acta: part B: atomic spectroscopy. - Oxford, 1967, currens
Volume/pages
52(1997) :2 , p. 205-218
ISSN
0584-8547
0038-6987
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle