Publication
Title
In situ plasma studies using a direct current microplasma in a scanning electron microscope
Author
Abstract
Microplasmas can be used for a wide range of technological applications and to improve the understanding of fundamental physics. Scanning electron microscopy, on the other hand, provides insights into the sample morphology and chemistry of materials from the mm‐ down to the nm‐scale. Combining both would provide direct insight into plasma‐sample interactions in real‐time and at high spatial resolution. Up till now, very few attempts in this direction have been made, and significant challenges remain. This work presents a stable direct current glow discharge microplasma setup built inside a scanning electron microscope. The experimental setup is capable of real‐time in situ imaging of the sample evolution during plasma operation and it demonstrates localized sputtering and sample oxidation. Further, the experimental parameters such as varying gas mixtures, electrode polarity, and field strength are explored and experimental V – I curves under various conditions are provided. These results demonstrate the capabilities of this setup in potential investigations of plasma physics, plasma‐surface interactions, and materials science and its practical applications. The presented setup shows the potential to have several technological applications, for example, to locally modify the sample surface (e.g., local oxidation and ion implantation for nanotechnology applications) on the µm‐scale.
Language
English
Source (journal)
Advanced Materials Technologies. - -
Related dataset(s)
Publication
2024
ISSN
2365-709X [online]
DOI
10.1002/ADMT.202301632
Volume/pages
(2024) , p. 1-16
Article Reference
2301632
ISI
001168639900001
Full text (Publisher's DOI)
Full text (open access)
The author-created version that incorporates referee comments and is the accepted for publication version Available from 25.08.2024
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Automated Electron diffractometer for high throughput identification of nanocrystalline materials.
Automated Electron diffractometer for high throughput identification of nanocrystalline materials.
Automated Electron diffractometer for high throughput identification of nanocrystalline materials.
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identifier
Creation 13.03.2024
Last edited 16.04.2024
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