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Title
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Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
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Author
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Language
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English
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Source (book)
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Secondary ion mass spectrometry: SIMS XI: proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry / Gillen, G. [edit.]
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Publication
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Chichester
:
Wiley
,
1998
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Volume/pages
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p. 327-330
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