Publication
Title
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Author
Language
English
Source (book)
Secondary ion mass spectrometry: SIMS XI: proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry / Gillen, G. [edit.]
Publication
Chichester : Wiley, 1998
Volume/pages
p. 327-330
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 12.09.2013
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