Title
Modeling of bombardment induced oxidation of silicon with and without oxygen floodingModeling of bombardment induced oxidation of silicon with and without oxygen flooding
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
conferenceObject
Publication
Chichester :Wiley, [*]
Source (book)
Secondary ion mass spectrometry: SIMS XI: proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry / Gillen, G. [edit.]
1
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle