Plasma-enhanced chemical vapour deposition of amorphous <script type="math/tex">As_{x}Se_{100-x}</script> films

Publication

Title				Plasma-enhanced chemical vapour deposition of amorphous $As_{x}Se_{100-x}$ films

Author				Nagels, P. Callaerts, R. Mertens, R.

Language				English

Source (book)				Chemical vapour deposition / Allendorf, M. [edit.]

Publication				s.l. : Electrochemical Society , 1997

Volume/pages				p. 1459-1466

UAntwerpen

Faculty/Department				Faculty of Business and Economics Faculty of Sciences. Chemistry

Research group

Publication type				H3 Book chapter

Affiliation				Publications with a UAntwerp address

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Creation

08.10.2008

Last edited

04.03.2024

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