Publication
Title
Plasma-enhanced chemical vapour deposition of amorphous films
Author
Language
English
Source (book)
Chemical vapour deposition / Allendorf, M. [edit.]
Publication
s.l. : Electrochemical Society , 1997
Volume/pages
p. 1459-1466
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identifier
Creation 08.10.2008
Last edited 04.03.2024
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