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Title
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Defect characterization in high temperature implanted 6H-SiC using TEM
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Author
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Language
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English
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Source (journal)
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Nuclear instruments and methods in physics research: B
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Publication
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1997
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DOI
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10.1016/S0168-583X(96)00954-8
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Volume/pages
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127/128
(1997)
, p. 347-349
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ISI
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A1997XG60500078
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Full text (Publisher's DOI)
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