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Title
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The formation of 3C-SiC in crystalline Si by carbon implantation at and annealing: a structural study
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Author
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Language
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English
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Source (journal)
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Journal of crystal growth. - Amsterdam
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Publication
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Amsterdam
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1997
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ISSN
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0022-0248
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Volume/pages
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181
(1997)
, p. 218-228
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