Publication
Title
TEM studies of processed Si device materials
Author
Abstract
Language
English
Source (journal)
Institute of Physics conference series. - London
Publication
London : 1997
ISSN
0305-2346
Volume/pages
157(1997), p. 393-402
ISI
000071954600079
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
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