|
Title
|
|
|
|
HREM study of ion implantation in 6H-SiC at high temperatures
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (journal)
|
|
|
|
Journal of electron microscopy. - Tokyo, 1953 - 2012
| |
|
Publication
|
|
|
|
Tokyo
:
1997
| |
|
ISSN
|
|
|
|
0022-0744
[print]
1477-9986
[online]
| |
|
Volume/pages
|
|
|
|
46
:4
(1997)
, p. 271-279
| |
|