|
Title
|
|
|
|
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (book)
|
|
|
|
Proceedings of the Fourth Micro- and Nano-Engineering [1997: Athens]
| |
|
Publication
|
|
|
|
1997
| |
|