Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
conferenceObject
Publication
Source (journal)
Proceedings of the Fourth Micro- and Nano-Engineering [1997: Athens]
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle