Publication
Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Language
English
Source (journal)
Proceedings of the Fourth Micro- and Nano-Engineering [1997: Athens]
Publication
1997
UAntwerpen
Faculty/Department
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identifier
Creation 08.10.2008
Last edited 04.03.2024
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