Publication
Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Language
English
Source (journal)
Proceedings of the Fourth Micro- and Nano-Engineering [1997: Athens]
Publication
1997
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 23.12.2015
To cite this reference