Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
conferenceObject
Publication
Source (journal)
Proceedings of the Fourth Micro- and Nano-Engineering [1997: Athens]
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle