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Title
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Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment
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Author
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Language
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English
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Source (journal)
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Journal of vacuum science and technology: A: vacuum surfaces and films. - New York, N.Y., 1983, currens
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Publication
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New York, N.Y.
:
1998
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ISSN
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0734-2101
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DOI
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10.1116/1.581359
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Volume/pages
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16
:4
(1998)
, p. 2400-2410
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ISI
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000074852700061
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Full text (Publisher's DOI)
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