Publication
Title
Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model
Author
Language
English
Source (journal)
Japanese journal of applied physics / Japan Society of Applied Physics. - Kyoto, 1962, currens
Publication
Kyoto : 1999
ISSN
0021-4922
1347-4065 [e-ISSN]
Volume/pages
38(1999), p. 4404-4415
ISI
000082871400032
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 29.07.2017
To cite this reference