Title
Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Kyoto ,
Source (journal)
Japanese journal of applied physics / Japan Society of Applied Physics. - Kyoto, 1962, currens
Volume/pages
38(1999) , p. 4404-4415
ISSN
0021-4922
1347-4065
ISI
000082871400032
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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