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Title
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Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model
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Author
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Language
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English
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Source (journal)
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Japanese journal of applied physics / Japan Society of Applied Physics. - Kyoto, 1962, currens
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Publication
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Kyoto
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1999
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ISSN
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0021-4922
1347-4065
[e-ISSN]
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DOI
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10.1143/JJAP.38.4404
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Volume/pages
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38
(1999)
, p. 4404-4415
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ISI
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000082871400032
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Full text (Publisher's DOI)
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