Title
Modelling of radio frequency capacitively coupled plasma at intermediate pressuresModelling of radio frequency capacitively coupled plasma at intermediate pressures
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
bookPart
Publication
Dordrecht :Kluwer Academic, [*]
Source (book)
Advanced technologies based on wave and beam generated plasmas / Schlüter, H. [edit.]
1
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle