Publication
Title
Modelling of radio frequency capacitively coupled plasma at intermediate pressures
Author
Language
English
Source (book)
Advanced technologies based on wave and beam generated plasmas / Schlüter, H. [edit.]
Publication
Dordrecht : Kluwer Academic, 1999
Volume/pages
p. 525-526
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 10.07.2013
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