|
Title
|
|
|
|
Modelling of radio frequency capacitively coupled plasma at intermediate pressures
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (book)
|
|
|
|
Advanced technologies based on wave and beam generated plasmas / Schlüter, H. [edit.]
| |
|
Publication
|
|
|
|
Dordrecht
:
Kluwer Academic
,
1999
| |
|
Volume/pages
|
|
|
|
p. 525-526
| |
|