Title
Investigation of the electron distribution functions in low pressure electron cyclotron resonance discharges Investigation of the electron distribution functions in low pressure electron cyclotron resonance discharges
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
bookPart
Publication
Dordrecht :Kluwer Academic, [*]
Source (book)
Advanced technologies based on wave and beam generated plasmas / Schlüter, H. [edit.]
ISI
000081413700057
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle