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Title
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Investigation of the electron distribution functions in low pressure electron cyclotron resonance discharges
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Author
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Language
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English
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Source (book)
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Advanced technologies based on wave and beam generated plasmas / Schlüter, H. [edit.]
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Publication
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Dordrecht
:
Kluwer Academic
,
1999
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Volume/pages
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p. 543-544
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ISI
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000081413700057
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