Title
XPS and TOFSIMS studies of shallow <tex>$Si/Si_{1-x}Ge_{x}/Si$</tex> layers XPS and TOFSIMS studies of shallow <tex>$Si/Si_{1-x}Ge_{x}/Si$</tex> layers
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Amsterdam : Elsevier ,
Source (journal)
Thin solid films. - Amsterdam : Elsevier, 1967
Volume/pages
343/344(1999) , p. 583-586
ISSN
1879-2731
ISI
000081103100149
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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