Publication
Title
Plasma-enhanced chemical vapour deposition at different temperatures of amorphous films
Author
Language
English
Source (journal)
Proceedings of the International School on Condensed Matter Physics: Thin Film Materials and Devices
Publication
1998
Volume/pages
10(1998), p. 231-239
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 12.09.2013
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