Title
|
|
|
|
Plasma-enhanced chemical vapour deposition at different temperatures of amorphous films
| |
Author
|
|
|
|
| |
Language
|
|
|
|
English
| |
Source (book)
|
|
|
|
Proceedings of the International School on Condensed Matter Physics: Thin Film Materials and Devices
| |
Publication
|
|
|
|
1998
| |
Volume/pages
|
|
|
|
10
(1998)
, p. 231-239
| |
|