Title
Plasma-enhanced chemical vapour deposition and structural characterization of amorphous chalcogenide films Plasma-enhanced chemical vapour deposition and structural characterization of amorphous chalcogenide films
Author
Faculty/Department
Faculty of Applied Economics
Publication type
article
Publication
Source (journal)
Physics and technology of semiconductors = Russia fizika y tekhnika poluprovodnikov
Volume/pages
32(1998) , p. 858-863
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle