Publication
Title
Plasma-enhanced chemical vapour deposition and structural characterization of amorphous chalcogenide films
Author
Language
English
Source (journal)
Physics and technology of semiconductors = Russia fizika y tekhnika poluprovodnikov
Publication
1998
Volume/pages
32(1998), p. 858-863
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 10.07.2013
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