Publication
Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Language
English
Source (journal)
Microelectronic engineering. - Amsterdam
Publication
Amsterdam : 1998
ISSN
0167-9317
Volume/pages
41/42(1998), p. 195-198
ISI
000073284600044
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 21.07.2017
To cite this reference