Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Amsterdam ,
Source (journal)
Microelectronic engineering. - Amsterdam
Volume/pages
41/42(1998) , p. 195-198
ISSN
0167-9317
ISI
000073284600044
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle