Title
Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Amsterdam ,
Source (journal)
Microelectronic engineering. - Amsterdam
Volume/pages
41/42(1998) , p. 195-198
ISSN
0167-9317
ISI
000073284600044
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000073284600044&DestLinkType=RelatedRecords&DestApp=ALL_WOS&UsrCustomerID=ef845e08c439e550330acc77c7d2d848
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000073284600044&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=ef845e08c439e550330acc77c7d2d848
Handle