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Title
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Optimal filtering versus regularization methods in the Fourierprecompensation based proximity neurocorrection in electron beam lithography
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Author
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Language
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English
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Source (journal)
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Microelectronic engineering. - Amsterdam
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Publication
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Amsterdam
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1998
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ISSN
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0167-9317
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DOI
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10.1016/S0167-9317(98)00044-6
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Volume/pages
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41/42
(1998)
, p. 195-198
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ISI
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000073284600044
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Full text (Publisher's DOI)
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