Title
Neurocorrection for proximity effects in electron beam lithography Neurocorrection for proximity effects in electron beam lithography
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
conferenceObject
Publication
Source (journal)
Annual Workshop on Nanoscale Integrated Circuits [1: 1998: Lille]
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle