Publication
Title
Neurocorrection for proximity effects in electron beam lithography
Author
Language
English
Source (book)
Annual Workshop on Nanoscale Integrated Circuits [1: 1998: Lille]
Publication
1998
UAntwerpen
Faculty/Department
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identifier
Creation 08.10.2008
Last edited 20.06.2024
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