Publication
Title
Neurocorrection for proximity effects in electron beam lithography
Author
Language
English
Source (journal)
Annual Workshop on Nanoscale Integrated Circuits [1: 1998: Lille]
Publication
1998
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 23.12.2015
To cite this reference