Neurocorrection for proximity effects in electron beam lithography

Publication

Title				Neurocorrection for proximity effects in electron beam lithography

Author				Jedrasik, P. Van Dyck, D.

Language				English

Source (journal)				Annual Workshop on Nanoscale Integrated Circuits [1: 1998: Lille]

Publication				1998

UAntwerpen

Faculty/Department				Faculty of Sciences. Physics

Publication type				P3 Proceeding

Affiliation				Publications with a UAntwerp address

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08.10.2008

Last edited

04.03.2024

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