|
Title
|
|
|
|
Prospects in the development and use of sputter cluster ion source
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (book)
|
|
|
|
SIMS XII: proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry / Benninghoven, A. [edit.]
| |
|
Publication
|
|
|
|
Amsterdam
:
Elsevier
,
2000
| |
|
Volume/pages
|
|
|
|
p. 251-254
| |
|