Publication
Title
Semianalytical description of nonlocal secondary electrons in a radio-frequency capacitively coupled plasma at intermediate pressures
Author
Language
English
Source (journal)
IEEE transactions plasma science
Publication
1999
Volume/pages
27(1999), p. 1339-1347
ISI
000083453000014
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 15.08.2017
To cite this reference