Title
Semianalytical description of nonlocal secondary electrons in a radio-frequency capacitively coupled plasma at intermediate pressures
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Source (journal)
IEEE transactions plasma science
Volume/pages
27(1999) , p. 1339-1347
ISI
000083453000014
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle