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Title
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Semianalytical description of nonlocal secondary electrons in a radio-frequency capacitively coupled plasma at intermediate pressures
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Author
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Language
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English
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Source (journal)
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IEEE transactions plasma science
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Publication
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1999
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DOI
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10.1109/27.799810
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Volume/pages
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27
(1999)
, p. 1339-1347
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ISI
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000083453000014
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Full text (Publisher's DOI)
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