Title
Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow dischargeModeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
article
Publication
New York, N.Y. :American Institute of Physics,
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Volume/pages
86(1999):6, p. 2990-3001
ISSN
0021-8979
1089-7550
ISI
000082232400010
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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