|
Title
|
|
|
|
Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge
|
|
|
Author
|
|
|
|
|
|
|
Language
|
|
|
|
English
|
|
|
Source (journal)
|
|
|
|
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
|
|
|
Publication
|
|
|
|
New York, N.Y.
:
American Institute of Physics
,
1999
|
|
|
ISSN
|
|
|
|
0021-8979
[print]
1089-7550
[online]
|
|
|
DOI
|
|
|
|
10.1063/1.371159
|
|
|
Volume/pages
|
|
|
|
86
:6
(1999)
, p. 2990-3001
|
|
|
ISI
|
|
|
|
000082232400010
|
|
|
Full text (Publisher's DOI)
|
|
|
|
|
|