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Title
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Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge
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Author
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Language
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English
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Source (journal)
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IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
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Publication
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New York, N.Y.
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1999
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ISSN
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0093-3813
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Volume/pages
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27
:5
(1999)
, p. 1406-1415
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ISI
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000083453000023
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Full text (Publisher's DOI)
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