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Title
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Capabilities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
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Author
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Language
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English
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Source (book)
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Analytical and diagnostic techniques for semiconductor materials, devices, and process / Kolbesen, B.O. [edit.]
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Publication
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Leuven
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s.n.
,
1999
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Volume/pages
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p. 147-159
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ISI
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000082287600013
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