Title
Capabilities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution Capabilities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
bookPart
Publication
Leuven :s.n., [*]
Source (book)
Analytical and diagnostic techniques for semiconductor materials, devices, and process / Kolbesen, B.O. [edit.]
ISI
000082287600013
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle