Publication
Title
Capabilities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Author
Language
English
Source (book)
Analytical and diagnostic techniques for semiconductor materials, devices, and process / Kolbesen, B.O. [edit.]
Publication
Leuven : s.n., 1999
Volume/pages
p. 147-159
ISI
000082287600013
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 04.05.2017
To cite this reference