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Title
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Plasma-enhanced chemical vapour deposition and structural characterization of amorphous chalcogenide films
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Author
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Language
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English
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Source (journal)
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Journal de physique: 4. - Les Ulis, 1991 - 2006
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Publication
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Les Ulis
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1999
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ISSN
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1155-4339
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DOI
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10.1051/JP4:1999890
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Volume/pages
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9
(1999)
, p. 717-724
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ISI
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000082524900023
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Full text (Publisher's DOI)
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