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Title
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Morphology and defects in shallow trench isolation structures
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Author
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Language
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English
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Source (journal)
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Conference series of the Institute of Physics. - London, 1971 - 1984
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Publication
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London
:
Institute of Physics
,
1999
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ISSN
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0305-2346
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Volume/pages
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164
(1999)
, p. 443-446
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ISI
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000166835300094
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