Publication
Title
Morphology and defects in shallow trench isolation structures
Author
Language
English
Source (journal)
Institute of Physics conference series. - London
Publication
London : 1999
ISSN
0305-2346
Volume/pages
164(1999), p. 443-446
ISI
000166835300094
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 29.04.2017
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