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Title
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Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative discharges
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Author
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Language
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English
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Source (journal)
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Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens
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Publication
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Bristol
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Institute of Physics
,
2000
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ISSN
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0963-0252
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DOI
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10.1088/0963-0252/9/4/314
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Volume/pages
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9
(2000)
, p. 583-591
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ISI
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000165341000015
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Full text (Publisher's DOI)
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