Publication
Title
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative discharges
Author
Language
English
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Publication
Bristol : Institute of Physics, 2000
ISSN
0963-0252
Volume/pages
9(2000), p. 583-591
ISI
000165341000015
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 20.07.2017
To cite this reference