Title
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative <tex>$SiH_{4}$</tex> dischargesElectron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative <tex>$SiH_{4}$</tex> discharges
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
article
Publication
Bristol :Institute of Physics,
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Volume/pages
9(2000), p. 583-591
ISSN
0963-0252
ISI
000165341000015
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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